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HomeTechnical PapersH2O in Semi Gas


Moisture Detection for Semi Gases via EP-IR Spectroscopy

Elsa E. Bonano, Jorge E. Perez, and Richard T. Meyer

PDF Version

 

Introduction

EP-IR is a new technology that provides opportunities for uncharted territories.

One of these territories is moisture analysis.

What limit of detection for moisture can be achieved?

EP-IRGAS Encoded Photometric- Integrated Real-Time Gas Analysis Solution

    –Incorporates an Aspectrics 128 channel EP-IR spectrometer and an integrated CIC Photonics 6m 4Runner long path gas cell

 

Equipment

EP-IR Spectrometer

  • Encoding disk
    • 128 wavelength channels
    • Vibration insensitivity
  • Compact (short path) spectrograph
    • Mid IR range
    • TE- cooled detector

4Runner Long Path Gas Cell

  • 6m pathlength
  • Integrated IR source
  • Stainless steel construction
  • Laminar gas flow
  • High energy throughput ~40%

EP-IR Spectrometry

Diagram provided by Aspectrics

 

Principles of Operation

  • Step 1
    • Infrared source projects the beam through the sample compartment onto the diffraction grating
  • Step 2
    • The grating dispersed the beam on the 128 channel encoded disk
  • Step 3
    • The spatially located reflective tracks on the encoded disk read the corresponding wavelengths
  • Step 4
    • Unique sinusoidal waves are created for the individual tracks on the encoded disk
  • Step 5
    • Infrared beams are brought back together to a single detector, which generates an interferogram
  • Step 6
    • Fourier Transform is applied to the interferogram, determining the intensity of the wavelengths

 

EP- IR vs NDIR/FTIR

  • EP-IR
    • High sensitivity
    • Highly rugged
    • Partial MIR spectrum analyzer
    • Scan speed (100 scans/second)
    • No hydroscopic material
  • Industrial FTIR
    • High sensitivity
    • Mildly rugged
    • Full MIR spectrum analyzer
    • 1- 4 scans/second scan speed
    • Sometimes hydroscopic material
  • NDIR
    • Medium sensitivity
    • Rugged
    • Not a full spectrum analyzer

Moisture at Varying Resolutions

 

Typical Gases on EP-IR

Multicomponent 5000 with 256 channels

Diagram provided by Aspectrics

 

Calibration (14.27ppm) - Water2.abin

 

Calibration (7.14ppm) - Water6.abin

 

Calibration (0.84 ppm) - Water5.abin

 

Chemobuilder

  • Aspectrics software designed to generate and validate calibration files.
  • Chemometric quantification algorithm is based on PCR.
  • Can automatically calculate PCR parameters based on calibrated spectra

 

Calculated Reference Spectra

 

Calibration Fitting

 

Calibration Linearity

 

Conclusions

  • For this particular system configuration, the system has an LOD for moisture of about 1ppm.
  • We used an incorrect configuration parameter of the EP- IR unit.
  • Some of the results seem to be affected by permeation of atmospheric moisture
  • There is room for improvement in the LOD

Future Work

  • Update EP- IR units firmware to incorporate latest signal processing algorithms.
  • Re- run moisture calibrations inside a secondary purging enclosure
  • Testing different gas cell pathlengths

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