IRGAS Options

IRGAS-50 "Science Package"

• The esential IRGAS system includes the ABB Bomem WorkIR FTIR Spectrometer, the 4Runner long path gas cell, coupling optics and the SPGAS analytical solution - see specifications for this system below

IRGAS EPI

• The IRGAS EPI offers minimum volume for inclusion on a semiconductor wafer processing tool

IRGAS 100C

• The NEMA 4X enclosure with air conditioner, enables use in punishing environments.

IRGAS-50 "Science Package" Specifications

Measurement Methodology FTIR + SS Long Path Gas Cells + Enhanced CLS Chemometrics

Detectable Species All gases and vapors except homopolar diatomics (N2, O2, H2)

and monatomics (Ar, He)

Sensitivity Range < 5 ppb to 100%, see chart of Lowest and Typical Sensitivities

FTIR Spectrometer ABB Bomem WorkIR, w/ either KBr or ZnSe Internal Optics

Spectral Resolution 1, 2, 4, 8, 16, 32, 64, 128 cm(-1)

Scan Speed 1.2 scans/sec @ 2 cm(-1) w/ MCT Detector

3 scans/sec @ 2 cm(-1) w/ DTGS Detector

Collection Time 2 to 900 sec

Infrared Source Globar @ 1450 deg C

Reference Laser Helium Neon (15,798.2 cm(-1))

Detectors LN2-MCT, TE-MCT, DTGS

Purge Pressure 30 psig

FTIR Purge Flow 5 l/min dry N2 (UHP N2 for moisture analysis)

Optics Purge Flow 5l/min dry N2 (UHP for moisture analysis)

Purge Gas Connectors 1/4" VCR or Swagelok

Long Path Gas Cells: Pathlengths: Fixed 1, 4, 6.5, & 9.6-meters; Variable 0.4 to 10.0-meters

Short Path Gas Cells 2, 5, 10, 15, 20-cm Pathlengths, SS, Heatable, Windows

Mirrors 304 Stainless Steel w/ Proprietary Corrosion-Resistant Gold Coating

Cell Body Nickel-plated 316L Stainless Steel

Gas Flow Dynamics Laminar Plenum Flow, Fast Sample Exchanges, No Unswept Volumes

O-rings/Seals Kalrez and/or Metal C-Seals, Viton

Input/Output Windows AR-ZnSe, ZnSe, BaF2, CaF2, AgBr, KBr, Quartz

Transfer Mirrors Gold-Coated, Manual 2-Position or PLC-Motorized

Gas Ports and Tubing 1/4" VCR, 316 SS

Sample Flow Max 10 l/min @ 1 atm

Sample Temperature Ambient to 300 deg C

Sample Pressure 10 torr to 20 atm

Pressure Transducer Available as an Option

Temperature Transducer Optional w/ Gas Cell Heating Package

System Software SPGASTM Specialty Gas Analysis Software: Weighted, Multiband, Multivariate Classical Least Squares Chemometrics; and SpectraStreamTM Fast Response Concentration Tracker

Computer Parameters Desktop or Laptop, Intel Pentium PC under Microsoft NT, 2000, XP

and XGA display (800 x 600 min)

Recommended Intel Pentium II, 400 MHz, Microsoft NT, 128 MB

Minimum Intel Pentium, 200 MHz, Microsoft NT, 64 MB

Communications Ethernet

Output RS232/422/485, analog output

Protocols Please request

Enclosures/Configurations Bench Top w/o Enclosure: IRGAS-50, IRGAS-100SP, IRGAS-100EPI

Transportable Composite Material Enclosure: IRGAS-100T, IRGAS-100MT

NEMA 4X SS Enclosure, w/ or w/o Refrigeration

Rack Mount or Wall Mount: IRGAS 200RM, IRGAS-200WM

Rollable Cart: Combines IRGAS w/ GC or MS

Module Mountable: IRGAS Moisture+Plus

Dimensions/Weight 19"w x 12"d x 16"h, 65 lbs minimum (for IRGAS-100EPI)

Power 120/240 volt, 50/60 Hz, 3 amps

Warranty One Year Parts and Labor xc Mirrors Case by Case

Technical Support Unlimited telephone, fax, and email support