IRGAS Moisture+ Plus^TM FTIR Gas Analyzer

About IRGAS Moisture+ Plus^TM FTIR GA

The Moisture+Plus^TM FTIR Analyzer is the newest addition to the IRGAS^TM line of fast-response (seconds), high-sensitivity (ppb) gas analyzers for the semiconductor industry and producers of electronic specialty gases. Designed for the analysis of Moisture PLUS other Impurity or Treatment gases, it incorporates a compact and rugged FTIR spectrometer with our temperature-controlled nickel-plated 316L stainless steel 4Runner^TM 6-meter gas cell, optical couplers, N2-purged cover, and purge-nitrogen purifier. Its performance is enhanced by proprietary gold-coated stainless steel mirrors and fast laminar flow from sampled gas streams. Combined with our SPGAS^TM and SpectraStream^TM software, this powerful instrument offers low cost-of-ownership for critical operations (cleaning, etching, epi-treatment, abatement) with strong acidic and basic electronic specialty gases.