IRGAS 100T & 100MT Advanced FTIR Gas Analyzers

Applications

• Process Timing Optimization
• Tool recipe monitoring and characterization
• Tool Troubleshooting
• PFC emissions measurements
• Air quality monitoring
• Measure performance of purifiers and abatement tools

Standard Configuration

• 4Runner^TM Long Path Gas Cell (nickel-plated 316 SS body, with protected Gold-coated SS mirrors)
• Hardigg Enclosure
• Suspension system
• Cell heaters and temperature controllers
• Nitrogen purifier
• SPGAS^TM hardware control and quantification software using weighted multiband multivariate CLS methodology.

Size and Weight

100T

30" X 30" X 34" tall (75cm X 75cm X 85cm tall);

weight: 195 lbs. (89 kg)

100MT

24" X 24" X 26" tall (60 cm X 60 cm X 65 cm tall);

weight: 125 lbs. (57 kg)

About IRGAS 100T & 100MT Advanced FTIR Gas Analyzers

CIC Photonics Inc. has developed truly transportable FTIR instruments for advanced gas analysis. The 100T and 100MT are based around the ABB Bomem WorkIR^TM FTIR suspended inside a rugged composite materials enclosure. All of the components fit within the enclosure allowing the whole FTIR system to be transported anywhere, within the facility or around the world. Which means, one FTIR can do the work of multiple single point instruments for multiple gas species.

Technical Benefits

• High sensitivity (ppb)
• Fast response (seconds)
• SEMI conductor process gas compatible (Corrosion resistant)
• User friendly (simple start-stop operation)
• Fast start up time within the facility
• Transportable

Options

• Sampling pumps, Gas manifolds
• SpectraStream^TM module for enhanced sensitivity
• Internal or external CPU & Touchscreen.