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Power of the IRGASTM Turnkey Solution
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Turnkey Real-Time, On-Line, FTIR Gas Analysis System
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- The IRGAS product line is designed for immediate connections to process and purge gas lines in industrial on-line applications; for real-time measurements of gas compositions to determine the ultimate product qualities and economic return-on-investments.
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Unique Weighted Multi-Band CLS Chemometrics
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- New to industrial gas analysis spectroscopy software is the CLS chemometrics methodology. It utilizes all of the absorption peaks-large and small--- in a weighted multi-band array for comparison to calibration data; this provides for a sensitivity improvement factor of five to ten.
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Exclusive Use of Internal HITRAN Gas Calibrations
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- For those common gases and impurities which also exist in the atmosphere, the HITRAN data base provides the peak by peak molecular absorptivity parameters used in the execution of Beer's Law; for absolute concentration calculations without the need to perform cumbersome gas by gas calibration experiments.
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High-Sensitivity Long Path Stainless Steel Gas Cell
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- CICP's long path gas cells are fabricated with specially-coated stainless steel mirrors that not only chemically-resist the corrosive etching gases but also provide the highest reflectivity and energy throughput for FTIR spectroscopy applications.
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State-of-the-Art Computer Controlled Gas Manifold
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- The gas manifolds of the IRGAS products are state-of-the-art welded stainless steel configurations which meet the stringent requirements of the semiconductor industry.
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SPGASTM and SpectraStreamTM Software
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- Totally new spectroscopy software for the quantitative analysis of process and purge gas compositions and impurities in real-time. Highest sensitivity and fastest time response to ensure the integrity of process operations.
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Total System Management and Fast Time Response
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- The SPGAS software provides total operational management of all components of
the IRGAS hardware package. The control options and displays are in the hands of
the process engineer. The system's fast time response (seconds) gives the
operator the immediate capability to alter reaction parameters or to shut down
the process to avoid bad products.
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| System
Designation |
Gas Cell |
Path Length |
Pressure Rating |
Sensitivity |
Detector |
| IRGAS XSA |
Ranger-EN |
9.6meter |
300 psi / 20 ATM |
low PPB - High PPM |
TE - InAs |
| IRGAS LPA |
4Runner or Ranger |
4, 6, 9.6meter |
300 psi / 20 ATM |
PPB - High PPM |
DTGS or LN2 |
| IRGAS SPA |
Scout-EN |
2, 5, 10, 15, 20cm |
300 psi / 20 ATM |
PPM - % |
DTGS or LN2 |
| IRGAS DCA |
Scout-EN mated with
4Runner |
2cm, 5cm, 10cm, 4meter, 6meter |
300 psi / 20 ATM |
PPB - % |
DTGS or LN2 |
| IRGAS HPA |
CRV |
0.5mm to 1cm |
2000 psi/136 ATM |
Pressure Dependent |
DTGS or LN2 |
| IRGAS Moisture+Plus |
4Runner |
6meter |
300 psi / 20 ATM |
PPB - High PPM |
DTGS or LN2 |
| IRGAS 100T & 100MT |
4Runner |
6meter |
300 psi / 20 ATM |
PPB - High PPM |
DTGS or LN2 |
| IRGAS Combustion |
4Runner |
6meter |
300 psi / 20 ATM |
PPM - % |
DTGS or LN2 |
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| Application |
IRGAS
System Models |
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| Combustion Gas Monitoring |
XSA |
LPA |
SPA |
DCA |
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M+Plus |
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| EPA Protocol Testing |
XSA |
LPA |
SPA |
DCA |
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M+Plus |
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| Emission Gas Analysis |
XSA |
LPA |
SPA |
DCA |
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M+Plus |
100T/MT |
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| Stack Gas Analysis |
XSA |
LPA |
SPA |
DCA |
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M+Plus |
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| Gas Certification |
XSA |
LPA |
SPA |
DCA |
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M+Plus |
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| Research Studies |
XSA |
LPA |
SPA |
DCA |
HPA |
M+Plus |
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50 |
| Semiconductor Monitoring |
XSA |
LPA |
SPA |
DCA |
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M+Plus |
100T/MT |
50 |
| Air Monitoring |
XSA |
LPA |
SPA |
DCA |
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M+Plus |
100T/MT |
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| Leak Detection |
XSA |
LPA |
SPA |
DCA |
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M+Plus |
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| Moisture Analysis |
XSA |
LPA |
SPA |
DCA |
HPA |
M+Plus |
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50 |
| Corrosive and Toxic Gases |
XSA |
LPA |
SPA |
DCA |
HPA |
M+Plus |
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50 |
| Hydrocarbons |
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HPA |
M+Plus |
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50 |
| Process Gases |
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HPA |
M+Plus |
100T/MT |
50 |
| Process
Timing Optimization |
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100T/MT |
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| Tool
Recipe Characterization |
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100T/MT |
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| Tool Troubleshooting |
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100T/MT |
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