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Power of the IRGASTM Turnkey Solution

 

Turnkey Real-Time, On-Line, FTIR Gas Analysis System

 

  • The IRGAS product line is designed for immediate connections to process and purge gas lines in industrial on-line applications; for real-time measurements of gas compositions to determine the ultimate product qualities and economic return-on-investments.

Unique Weighted Multi-Band CLS Chemometrics

 

  • New to industrial gas analysis spectroscopy software is the CLS chemometrics methodology. It utilizes all of the absorption peaks-large and small--- in a weighted multi-band array for comparison to calibration data; this provides for a sensitivity improvement factor of five to ten.

Exclusive Use of Internal HITRAN Gas Calibrations

 

  • For those common gases and impurities which also exist in the atmosphere, the HITRAN data base provides the peak by peak molecular absorptivity parameters used in the execution of Beer's Law; for absolute concentration calculations without the need to perform cumbersome gas by gas calibration experiments.

High-Sensitivity Long Path Stainless Steel Gas Cell

 
  • CICP's long path gas cells are fabricated with specially-coated stainless steel mirrors that not only chemically-resist the corrosive etching gases but also provide the highest reflectivity and energy throughput for FTIR spectroscopy applications.

State-of-the-Art Computer Controlled Gas Manifold

 
  • The gas manifolds of the IRGAS products are state-of-the-art welded stainless steel configurations which meet the stringent requirements of the semiconductor industry.

SPGASTM and SpectraStreamTM Software

 
  • Totally new spectroscopy software for the quantitative analysis of process and purge gas compositions and impurities in real-time. Highest sensitivity and fastest time response to ensure the integrity of process operations.

Total System Management and Fast Time Response

 

  • The SPGAS software provides total operational management of all components of the IRGAS hardware package. The control options and displays are in the hands of the process engineer. The system's fast time response (seconds) gives the operator the immediate capability to alter reaction parameters or to shut down the process to avoid bad products.

 

System Designation Gas Cell Path Length Pressure Rating Sensitivity Detector
IRGAS XSA Ranger-EN 9.6meter 300 psi / 20 ATM low PPB - High PPM TE - InAs
IRGAS LPA 4Runner or Ranger 4, 6, 9.6meter 300 psi / 20 ATM PPB - High PPM DTGS or LN2
IRGAS SPA Scout-EN 2, 5, 10, 15, 20cm 300 psi / 20 ATM PPM - % DTGS or LN2
IRGAS DCA Scout-EN mated with 4Runner  2cm, 5cm, 10cm, 4meter, 6meter 300 psi / 20 ATM PPB - % DTGS or LN2
IRGAS HPA CRV 0.5mm to 1cm 2000 psi/136 ATM Pressure Dependent DTGS or LN2
IRGAS Moisture+Plus 4Runner 6meter 300 psi / 20 ATM PPB - High PPM DTGS or LN2
IRGAS 100T & 100MT 4Runner 6meter 300 psi / 20 ATM PPB - High PPM DTGS or LN2
IRGAS Combustion 4Runner 6meter 300 psi / 20 ATM PPM - % DTGS or LN2

 

Application IRGAS System Models
Combustion Gas Monitoring XSA LPA SPA DCA M+Plus
EPA Protocol Testing XSA LPA SPA DCA M+Plus
Emission Gas Analysis XSA LPA SPA DCA M+Plus 100T/MT
Stack Gas Analysis XSA LPA SPA DCA M+Plus
Gas Certification XSA LPA SPA DCA M+Plus
Research Studies XSA LPA SPA DCA HPA M+Plus 50
Semiconductor Monitoring XSA LPA SPA DCA M+Plus 100T/MT 50
Air Monitoring XSA LPA SPA DCA M+Plus 100T/MT
Leak Detection XSA LPA SPA DCA M+Plus
Moisture Analysis XSA LPA SPA DCA HPA M+Plus 50
Corrosive and Toxic Gases XSA LPA SPA DCA HPA M+Plus 50
Hydrocarbons HPA M+Plus 50
Process Gases HPA M+Plus 100T/MT 50
Process Timing Optimization 100T/MT
Tool Recipe Characterization 100T/MT
Tool Troubleshooting 100T/MT

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