EPITORR

EPITORR Portable Gas Anaysis System
	Description
		The unit is a high sensitivity and fast response time analytical system built for the detection of possible leaks, gas impurities and moisture levels in real time. The system is designed to provide the integration and control of the hardware elements, as well as the spectral analysis and chemometrics, to determine the concentration of impurities in gases. The real-time gas analysis is performed through the FTIR Spectrometer which contains a special gas sample compartment that is connected directly to the gas sampling port for continuous sampling. The Spectrometer can be set to perform continuously an “x” number of scans of the sample gas and store this data as an interferogram. Every time the interferogram is completed the computer retrieves this interferogram from the spectrometer and performs the quantitative gas analysis of the impurities.
	Gas Sampling Locations
		Transfer Chamber / Load Lock Chamber Exhaust Process Gas
	Applications
		Measures Moisture in Batch Load Lock, Transfer Chamber and Process Chamber In-Situ Leak Detection after Preventive Maintenance on systems that have seen process gases Process Gas Concentrations – Monitor effects of bottle changes Monitor degradation of reactor chamber o-rings by the detection of out-gassed HF Monitoring the life of gas purifiers
	Specifications
		–Sizing L/W/H , Weight 26 x 24 x 35 w/out castors, weight ≈ 170lbs –Facilities (Power, Air, Nitrogen) Power ≈ 600 watts, N2 ≈ 10slpm –Performance Capability –Operating Ranges such as pressures, temperatures Max pressure = 150 psi, Max temp = 220°C

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